Funding
We acknowledge funding by the following agencies and projects.
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BMBF-project NanoScopeFutur-2D of the NanoMatFutur -
BMBFComplexity Scaling of Quantum Photonic Systems -
BMBF QuantumAktiv programme (Grant-ID: 13N15429) -
TAB-project Thüringer Research Group FastPhoton -
DFG CRC 1375 Nonlinear Optics down to Atomic scale -
DFG IRTG 2675 - Tailored metasurfaces (MetaActive) -
DLR Project QUICK3 -
Max Planck School of Photonics