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FN;CHARSET=Windows-1252:Martin Miculka
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EMAIL:martin.miculka@uni-jena.de
ORG;CHARSET=Windows-1252;TYPE=work:Friedrich Schiller University Jena;Atomi
 c Layer Deposition
ADR;CHARSET=Windows-1252;TYPE=work:;;Albert-Einstein-Straße 7;Jena;;07745;
 Germany
TEL;TYPE=voice,work:+49 3641 807-428
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